马波（Ma Bo, Research Fellow），男，1984年出生，博士，研究员，博士生导师。分别于2008年和2010年获得吉林大学学士和硕士学位，2016获得清华大学博士学位，师从尤政院士。2017年赴美国斯坦福大学CMUT技术发明人Butrus T. Khuri-Yakub教授课题组做博士后。2020年入职斯坦福大学电气工程系E. L. Ginzton实验室，同年与Khuri-Yakub教授创立Orchard Ultrasound Innovation公司。2022年回国，加入华中科技大学机械科学与工程学院至今。

       聚焦智能微系统技术的前沿领域，开展高端微纳芯片、MEMS智能传感器、智能超声医疗装备的研究。在IEEE T-UFFC、JMEMS、IEEE IUS等领域内顶刊及国际会议上发表SCI论文10余篇。兼任T-UFFC、JAP、Applied Mathematical Modeling等期刊审稿人。获授权发明专利10余项，其中第一发明人申请1项美国专利群（含7-10个单项发明），获授权2项美国专利及1项国际专利，以上专利成功实现成果转化。

科研项目

[1]美国能源部高级研究计划局，Thermoacoustic Root Imaging，2017.08-2021.12，223.5万美元，结题，主要成员
[2]美国国立卫生研究院，Novel Transducer Technology for Transcranial Ultrasound，2018.01-2020.02，188.6万美元，结题，主要成员
[1]美国能源部高级研究计划局，Thermoacoustic Root Imaging，2017.08-2021.12，223.5万美元，结题，主要成员
[2]美国国立卫生研究院，Novel Transducer Technology for Transcranial Ultrasound，2018.01-2020.02，188.6万美元，结题，主要成员

论文专著与专利

代表性论文：
[1]B. Ma, K. Firouzi and B. T. Khuri-Yakub. “Multilayer Masking Technology for Fabricating Airborne CMUTs with Multi-depth Fluidic Trenches.” Journal of Microelectromechanical Systems, Early access on IEEE Xplore.

[2]J. Joseph, B. Ma and B. T. Khuri-Yakub. “Applications of Capacitive Micromachined Ultrasonic Transducers: A Comprehensive Review.” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2022, Vol. 69, No. 2, pp. 456-467.

[3]B. Ma, K. Firouzi, K. Brenner and B. T. Khuri-Yakub. “Wide Bandwidth and Low Driving Voltage Vented CMUTs for Airborne Applications.” IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2019, Vol. 66, No. 11, pp. 1777-1785.

[4]B. Ma, K. Firouzi, K. Brenner and B. T. Khuri-Yakub. “High Sensitivity and Wide Bandwidth Airborne CMUTs with Low Driving Voltage.”, IEEE International Ultrasonics Symposium (IUS), 2019, pp. 1201-1204. (Highest Score Abstract, Oral Report).

[5]B. Ma, C. Chang, H. K. Oguz, K. Firouzi and B. T. Khuri-Yakub. “Multi-Parameter Optimization of Vented CMUTs for Airborne Applications.”, IEEE International Ultrasonics Symposium (IUS), 2017, pp. 1-4.

[6]B. Ma, Z. You, Y. Ruan, et al. “Electrostatically actuated MEMS relay arrays for high-power applications.” Microsystem Technologies, 2016, 22(4): 911-920. 

[7]B. Ma, Z. You, Y. Ruan. “Vacuum Bouncing Dynamics Dominated by van der Waals Forces in MEMS Relays.” 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2016, pp. 593-596.

[8]B. Ma, Z. You, Y. Ruan, S. K. Chang, G. F. Zhang. “High-Power MEMS Relay Array with Improved Reliability and Consistency.” 18th IEEE International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015, pp. 2156-2159.

代表性专利：
[1]Bo Ma, George Quintin Stedman, Arif Sanli Ergun, Gerard Touma, and Butrus T. Khuri-Yakub, Capacitive Micromachined Ultrasonic Transducer, No. 63/286,161（美国发明专利群，含7-10项）

[2]Bo Ma, Jose Joseph, Kamyar Firouzi, and Butrus T. Khuri-Yakub, Contoured electrode for capacitive micromachined ultrasonic transducer, US20210220873.

[3]Bo Ma, Kamyar Firouzi, and Butrus T. Khuri-Yakub and Jose Joseph, Pulse train excitation for capacitive micromachined ultrasonic transducer, US20210220872.

[4]MA Bo, FIROUZI Kamyar, KHURI-YAKUB Butrus T., JOSEPH Jose, Contoured electrode and/or pulse train excitation for capacitive micromachined ultrasonic transducer, WO2021150519.

[5]阮勇，马波，常双凯，张高飞，尤政。 MEMS继电器、悬臂梁开关及其形成方法，中国，ZL2014101510016。