崔健博士
联系电话:010****8911
  • 所在单位:北京大学
  • 所在城市:北京
  • 邮箱:eri****@pku.edu.cn
  • 通讯地址:北京市海淀区燕园街道颐和园路5号
详细 · 介绍
Expert introduction

教育工作经历

2011年获得北京大学固体电子学与微电子学专业博士学位;2009-2010年 德国弗莱堡大学微系统研究所访问学者;随后在中国航天三院任高级工程师、副主任设计师,从事高精度导航级微惯性器件研究。2018年,加入北京大学微电子学研究院,任副研究员,高级工程师,现任北京大学集成电路学院院长助理、测试实验室主任。

研究成果

       崔健博士长期致力于微纳传感器件与系统的研究,在MEMS惯性器件、集成谐振器件、传感器微弱信号检测、精密信号处理电路、传感器控制系统设计、自动化测试等方面取得多项重要创新性成果。承担及参与国家重点研发计划子课题、973项目子课题、装发共性基金、航天创新基金及创新特区课题、装发“十二五”预研、“十三五”预研、探索一代等项目十余项,其中四项目结题获评优秀。近年来的主要研究方向是高端传感器产业化技术、微纳加工及封装技术,发表国内外SCI/EI 期刊和学术会议论文60余篇,申请和授权国家发明专利20余项。



代表性论文

JOURNAL PUBLICATIONS

1. J. Cui and Q. Zhao, "Thermal Stabilization of Quality Factor for Dual-axis MEMS Gyroscope Based On Joule Effect In-situ Dynamic Tuning",  IEEE Transactions on Industrial Electronics , 2023. doi: 10.1109/TIE.2023.3250739.

2. Y. Liu, Q. Zhao, D. Zhang and J. Cui*, "Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices based on Image Recognition",  IEEE Transactions on Semiconductor Manufacturing , 2023. doi: 10.1109/TSM.2023.3248617.

3. S. Chen, Q. Zhao and J. Cui*, "Effect of Proton Radiation on Mechanical Structure of Silicon MEMS Inertial Devices",  IEEE Transactions on Electron Devices , vol. 69, no. 9, pp. 5155-5161, Sept. 2022.

4. J. Cui and Q. Zhao, "A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope With Off-Plane Coupling Suppression Silicon Gratings”,  IEEE Transactions on Industrial Electronics , vol. 69, no. 11, pp. 11765-11773, Nov. 2022.

5. Dong Li, Mengxia Liu, Qiancheng Zhao and Jian Cui*, "Phase noise modelling of MEMS resonant accelerometer with non-AGC-driven circuit",  J. Micromech. Microeng .,32 064001.

6. J. Cui, Q. Zhao and G. Yan, "Effective bias warm-up time reduction for MEMS gyroscopes based on active suppression of the coupling stiffness",  Microsyst & Nanoeng , vol. 5, (no. 1), pp. 18, 2019-01-01 2019.

7. J. Cui, G. Yan, Q. Zhao, "Enhanced temperature stability of scale factor in MEMS gyroscope based on multi parameters fusion compensation method",  Measurement , 2019, 148(106947).

8. J. Cui, and Q. Zhao, "Bias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self-sensing compensation",  Micro & Nano Letters , 2020, 15(4), pp. 234-238.

9. J. Cui, Yang H, Li D, Song Z, Zhao Q., "A Silicon Resonant Accelerometer Embedded in an Isolation Frame with Stress Relief Anchor",  Micromachines . 2019; 10(9):571.

10. Li D, Zhao Q. and J. Cui*, "High-precision frequency measurement for microresonant sensors based on improved modified multi-phase clock method",  Review of Scientific Instruments,  92, 015004 (2021)

11. Bai, Z., J. Cui*, Zhao, Q., Yang, Z. and Yan, G., "Initial frequency split reduction of MEMS ring gyroscope based on cascaded springs geometrical compensation".  Electron. Lett. , 2019, 55: 806-808.

CONFERENCE PUBLICATIONS

12. J. Cui and Q. Zhao, "120 ppm Quality Factor Thermal Stability from -40℃ to +60℃ of a Dual-Axis MEMS Gyroscope Based on Joule Effect Dynamic Control",  IEEE MEMS 2023 , Munich, Germany, pp. 833-836.

13. Y. Liu, Q. Zhao, D. Zhang and J. Cui*, "Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image Recognition",  IEEE MEMS 2023 , Munich, Germany, pp. 885-888.

14. Y. Liu, Q. Zhao, D. Zhang and J. Cui*, "Stiffness Imbalance Errors Trimming For Silicon Mems Tuning-Fork Gyroscopes With Low Cost Picosecond Lasers", IEEE Transducers  2023, Kyoto, JAPAN.

15. S. Chen, J. Cui* and Q. Zhao, "Proton Radiation Effect On Mechanical Structure of Silicon Mems Gyroscopes",  IEEE MEMS   2022 , Tokyo, Japan, pp. 758-761.

16. M. Liu, J. Cui*, D. Li and Q. Zhao, "A 3 PPM/°C Temperature Coefficient of Scale Factor for a Silicon Resonant Accelerometer Based on Crystallographic Orientation Optimization",  IEEE Transducers  2021, Orlando, FL, USA , pp. 116-119.

17. J. Cui and Q. Zhao, "In-Situ Mode-Matching Control for a Single-Chip Horizontal Dual-Axis MEMS Gyroscope Based on Modulating Quadrature Coupling with Silicon Gratings",  IEEE Transducers  2021, Orlando, FL, USA , pp. 1198-1201.

18. J. Cui and Q. Zhao, "A Tactical-Grade Monolithic Horizontal Dual-Axis Mems Gyroscope Based on off-Plane Quadrature Coupling Suppression Silicon Gratings",  IEEE MEMS 2021 , Gainesville, FL, USA, pp. 814-817.

19. J. Cui, M. Liu, H. Yang, D. Li and Q. Zhao, "Temperature Robust Silicon Resonant Accelerometer with Stress Isolation Frame Mounted on Axis-Symmetrical Anchors",  IEEE MEMS 2020 , Vancouver, BC, Canada, pp. 791-794.

20. Yang, H., J. Cui *. and Zhao, Q., "A wheeled horizontal dual-axis mems gyroscope based on single proof mass with mechanical coupling suppression silicon gratings",  IEEE MEMS 2020 , Vancouver, Canada, pp. 749-752.

21. J. Cui, Q. Zhao, Y. Wang and G. Yan, "Shortening Bias Warm-Up Time with Active Control of the Coupling Stiffness for Mems Gyroscopes",  IEEE Transducers 2019 , Berlin, Germany, pp. 2041-2044.

22. J. Cui, Q. Zhao, Z. Bai and G. Yan, "An 8PPM/°C Temperature Sensitivity of the Scale Factor in MEMS Gyroscope Based on Multi Parameters Fusion Compensation Method",  IEEE MEMS 2019 , Seoul, Korea (South), pp. 696-699.

23. Z. Bai, J. Cui*, Q. Zhao, Y. Wang and Z. Yang, "Geometric Compensation of (100) SCS Vibrating Ring Gyroscope for Mode-Matching Achieving High Immunity to Fabrication Imperfections",  IEEE Transducers 2019 , Berlin, Germany, pp. 1858-1861.